February 2004
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How Hydrogen Sensors Work
by Nate Speer
H2Scan, LLC

Hydrogen sensors have been around for many years with the ability to detect hydrogen, yet with many limitations and drawbacks. Companies have searched for a way to detect hydrogen reliably, or monitor hydrogen concentrations for industrial applications effectively. Worker safety, and process efficiency has forced industry to develop hydrogen sensors which are specific to hydrogen. As this industry grows and changes, so must its ability to monitor H2 in an effective manner.


The Basics
The sensors developed by H2Scan detect hydrogen in a range of concentrations from a few parts per million to 100% hydrogen. To measure hydrogen in low and high ranges, the sensors utilize Pd/Ni thin films. The low level sensor is a MOS capacitor with a Pd/Ni plate for one side of the capacitor, and the high level sensor is a meandering Pd/Ni thin film resistor. They operate on hydrogen partial pressure and does not require oxygen. To improve accuracy, the sensor also has no cross sensitivity to other combustible gases, including natural gas, methane, propane, and butane. (Photo right: H2Scan Hydrogen Sensor)

High Hydrogen Level Sensors
To measure high hydrogen levels, the H2Scan sensor uses a Pd/Ni thin film resistor. The resistance of the H-resistor changes as a function of the hydrogen concentration and operates up to one atmosphere of hydrogen and down to 0.005 atmosphere of hydrogen (0.5% hydrogen in air or nitrogen). Operation at hydrogen partial pressures up to 35 atmospheres has been demonstrated. The palladium catalyzes (breaks the molecular bond of the hydrogen molecule) and the hydrogen atoms attach to sites (palladium atoms) on the surface of the palladium-nickel thin film. The hydrogen atoms then diffuse into the bulk of the thin film and reside in interstitial sites in the metallic structure. These interstitial hydrogen atoms increase electron scattering and increase the electrical resistance of the thin film. The change in resistance is measured to determine the level of hydrogen that is detected.

Since the resistivity of metals increases with increasing temperature, temperature sensitivity is managed by controlling the temperature of the H-resistor. A resistive thin film heater and temperature sensing resistor are manufactured on the silicon chip. The electronics measure the resistance of the temperature sensing resistor and control the temperature to a fraction of a degree centigrade through the heater resistor. Then , the operating temperature is chosen to be higher than ambient to provide control and prevent condensation of water in high humidity operations.

Low-level Hydrogen Sensors
The second embodiment of this technology, the low-level hydrogen sensor, is configured to measure from 10 ppm to 1% hydrogen at one atmosphere of pressure. The palladium-nickel thin film is used to form the MOS capacitor. The Pd/Ni thin film is deposited on an insulating thin film that forms a dielectric between the Pd/Ni metal plate and the n-silicon opposite plate. Some of the absorbed hydrogen atoms in the Pd/Ni reside at the metal/dielectric interface and the presence of this atom changes the electric field of the capacitor, changing the capacitance. The change in capacitance is proportional to the hydrogen concentration in the sampled gas and sensed with specialized electronic systems.

Summary
For low- and high-level hydrogen sensing, these two implementations of the catalytic effect of palladium on hydrogen complement one another. Due to the different technologies, the sensing ranges overlap and therefore have a wide range of capability. In addition, each technique addresses its own range and can stand-alone individually.

In summary, this system is:

* Hydrogen specific
* Insensitive to other combustible gases
* Stable, repeatable operation over a very wide range of hydrogen concentrations
* Does not need oxygen to detect or monitor hydrogen
* Small, compact, low power.

Whether in today’s present applications or looking forward to the hydrogen economy, the push towards a quality, hydrogen-specific sensor is crucial. It will provide needed safety and the confidence to know that our monitoring and detection issues are handled in an effective and safe manner.